1. High ultimate pressure
Ultimate pressure 7.5x10-3 torr can be achieved by unit pump.
2. Energy saving and environmental friendly
Dry screw pump eliminate the problem of process contamination and
polluted disposal from traditional oil or water ring vacuum pump
3. The cleanest vacuum process
Neither water nor oil in chamber, and so process isn’t polluted.
4. Powerful blow down ability
A pair of rotors has transmission function to blowdown processes powder.
5. Wide range of application
Dry screw pump can bear to wide range process, including steam, and corrosive gas.

1. Inlet
2. Exhaust
3.Timing Gear
4. Oil
5. Bearings
6.Screw Rotor
7.Water Jacket
8. Shaft seals
9. Barrier gas
10. Dilution gas
11. Coupling